Flexible inorganic thin film materials, devices and their functionalization have attracted much attention in recent years. However, most of the traditional thin films are deposited on substrates, so it is difficult to study the properties of thin films independently and expand their applications. In this project, inorganic films are detached from the substrate and assembled into three-dimensional micro-nano mesostructures. Through stress design and control, crimping and forming are realized, and new three-dimensional micro-nano tubes and spiral structures are created. This project conducted in-depth research on these three-dimensional micro-nano structures, discovered their unique properties and production mechanisms, and explored their applications in the fields of micro-nano machines and on-chip photoelectricity.  (1) A universal planar peeling and crimping method is proposed to prepare three-dimensional micro-nano mesostructures, which is extended to a wide range of material systems, including metals, semiconductors and dielectric materials. The mechanical properties of the film were adjusted to control the direction of curling, and the superelasticity of the metal microspring structure was discovered. The surface tension of particles is used to assist the assembly of inorganic films, breaking through the limit of pipe diameter determined by film thickness and strain difference. It was found that the coiled thin film structure of dielectric/organic composite materials can achieve dynamic deformation in response to external stimuli. Related papers were published in Adv. Mater.、Published in journals such as Nanoscale, Lab Chip, etc., and was published by J. A. Rogers has repeatedly cited and commented positively in the Nature sub-journal. (2) Uncover the sub-wavelength effect of curled thin film optical microcavities, based on integrating dielectric and optoelectronic materials on tubular microcavity chips, and optimize and improve the performance of its optical and optoelectronic devices. It was found that the on-chip tubular microcavity based on a curled metal/dielectric composite film has both ultra-sensitive characteristics and a high quality factor. Introduce a polymer film that responds to humidity stimulus to achieve ultra-sensitive humidity detection. The infrared photodetector with full-angle and wide-spectrum enhancement is achieved by strain-engineering curling infrared quantum wells. Related papers were published in Sci. Adv.、Laser Photonics Rev.、Nanoscale and other magazines. D., professor at Johns Hopkins University in the United States. H. Gracias, Professor A., University of Southern Australia, Australia. Francois et al. quoted relevant results of this project and affirmed the important application prospects of these results. (3) Discovering a new bubble driving mechanism at low Reynolds numbers, selectively introducing catalytic materials, and realizing high-performance tubular micro-nano machines. The concept and prototype of a coiled tubular catalytic reaction micro-actuator were proposed, a new mechanism of bubble driving in micro-nano actuators was revealed, and the theoretical curve and limit of motion speed were discovered. Discover multiple regulatory behaviors and synergistic mechanisms for catalyst-driven reactions. The performance of micro-nano actuators and chemical energy-mechanical energy conversion efficiency are improved by selectively introducing catalytic materials and corresponding fine structures, and the internal principles are explained. Related papers were published in Chem. Soc. Rev.、Nanoscale、J. Mater. Chem.、In journals such as NPG Asia Mater., one of the papers was a highly cited paper on ESI. Professor at Pennsylvania State University and deputy editor-in-chief of the American Chemical Society. E. Mallouk, Chairman of the Department of Nanoengineering at the University of California, San Diego, J. Professor Wang and others have repeatedly cited the new mechanism for catalytic movement proposed by this project.  The 8 representative papers of this project were cited 465 times by him in high-level SCI papers including the Nature sub-journal. Obtained 7 authorized China invention patents. The first person to complete the project during the research period received funding from the National Natural Science Foundation of China for Outstanding Youth Fund and the Yangtze River Scholars Young Scholars Project of the Ministry of Education.