The high-temperature and high-precision MEMS pressure sensor developed in this project belongs to a special electronic component in the field of information science. It is mainly used in the combustion chambers of aerospace turbofans and ramjets, new rocket engines, heavy-duty gas turbines, coal-fired gas boilers and other power equipment. Pressure monitoring of key components such as compressors. Pressure monitoring of these critical components not only helps improve combustion performance and propulsion efficiency, but also helps assess the health and safety status of the component. In the past, such components were monopolized by foreign manufacturers and could not be independently controlled domestically, resulting in uncontrollable downstream progress of the industrial chain and even the control of key national projects. High-temperature and high-precision MEMS pressure sensor technology can provide key technical support for the development of intelligent/advanced power systems such as hypersonic engines, heavy rocket engines, and large aeroengines. Taking into account the low development status of domestic engineering capabilities for high temperature pressure sensors above 150 ° C and the reality of foreign embargoes on my country's high temperature pressure sensors, the successful development of high temperature and high precision MEMS pressure sensors above 150 ° C marks a major breakthrough in key basic technologies that my country's national defense science and technology industry must master.