The research of this project belongs to the field of metrology science and technology.
Nano-films have been widely used in micro-electromechanical, optoelectronic devices, solar cells, sensors and other fields because they have the advantages of both traditional composite materials and modern nanomaterials. In the past 10 years, nano-thin film devices have been developing rapidly at a speed that transcends Moore's Law. Finishing technology has made it easy to fabricate previously unimaginable tiny and complex shaped devices, but it has also brought greater importance to nano-metrology characterization. Big challenge. Compared with the rapid development of materials research and development, the current domestic research on measurement methods such as nano films and related standard materials is lagging behind in China and cannot meet the needs of metrology and testing. Therefore, nano magnitude standards and traceability are urgently needed to be solved in the development of new nano material technology in my country. problem. Standard methods and standard material systems are the highest manifestations of the level of measurement and testing technology, the prerequisite for the development of nano-functional materials, and the technical basis for guiding and promoting the development of advanced processing and measurement technologies. In response to this domestic situation, this project has purposefully carried out the development and application of standard methods for measuring nano films and particles and related standard materials. Through project research, a total of 3 national standards for nano-film and particle size analysis have been established, and 9 national-level standard materials in two categories of nano-film thickness and specific surface area have been approved, and have been applied well, filling the gaps in the standard methods and standard material system for nanometric film and particle analysis. The overall research on the project has reached the international advanced level.
This project has originally developed two types of standard materials, namely nanometer tantalum pentoxide film thickness and specific surface area, and fully owns independent intellectual property rights. It has been approved by the General Administration of Quality Supervision, Inspection and Quarantine as a national secondary standard material [the standard material numbers are GBW (E) 130419-130422 and GBW (E) 130275-130279]. It is superior to similar foreign products (IRMM's BCR-261T and NIST's SRM1900, 1899, 1897) in terms of magnitude coverage, economy, and uncertainty of fixed value. The novelty search by the Shanghai Science and Technology Novelty Search Consulting Center of the Chinese Academy of Sciences shows that the development technology of this project has not seen the same literature or patent reports, and is novel and innovative. It has filled the gaps in standard materials in related fields in my country and reached the international advanced level of similar research. At the same time, this project has also drafted and approved 3 national standards (GB/T 26645.1-2011 "Particle Size Analysis Liquid Gravity Settlement Method-Part 1: General Rules ", GB/T29025-2012" Resistance Method for Particle Size Analysis "and GB/T28632-2012" Surface Chemical Analysis, Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy Transverse Resolution Determination "), the establishment of three measurement standard methods and coordinated use of relevant standard materials have standardized the measurement and characterization methods of new nano materials and improved the measurement method system of new nano materials in my country. Provide technical guarantee for the repeatability of nano-film and particle measurement data and the comparability of measurement results between laboratories. The research results of this project have been authorized for 3 invention patents, published 7 papers in academic journals at home and abroad, and cultivated a research team for the metrology and characterization of new micro-nano materials composed of young and middle-aged scientific research backbones.
At present, the nano-films and specific surface area standard materials developed in this project are widely used in metrology and testing institutions and material R & D and production enterprises, including Beijing City Physical and Chemical Analysis and Testing Center, Shenzhen Material Surface Analysis and Testing Center, Shanghai Institute of Silicate, Chinese Academy of Sciences and other third-party testing laboratories, scientific research institutions and product R & D and production enterprises, etc., unanimously believe that this series of standard materials is accurate and reliable in magnitude, good stability, and easy to use. It ensures the accuracy of analytical results such as the thickness of nano films, achieves traceability of values, and can completely replace similar foreign reference materials. In recent years, these two types of reference materials have been well used in East China and even the whole country, providing reference materials supply to nearly 500 institutions. In addition, the national standards formulated by this project are used as a unified method by a large number of testing institutions and film and particle research and development companies, and the social benefits generated are also incalculable.