The "Research and Formulation of Testing Technical Standards for Gas and Electronic Shielding Materials for the Semiconductor Industry" project is a scientific research project undertaken by our institute of Shanghai City Science and Technology Commission, with project number: 08DZ0501800. The project is packaged by two sub-topics:"Research on the Standard System of Electromagnetic Shielding Materials" and "Research and Formulation of Technical Standards for the Detection of Hazardous Impurities in Gases for the Semiconductor Industry".
Electromagnetic shielding materials are used in many fields such as industrial manufacturing, environmental protection, human protection, and electromagnetic compatibility. They are a new type of green electrical basic material. The sub-project of "Research on the Standard System of Electromagnetic Shielding Materials" has developed a set of shielding effectiveness testing devices for planar electromagnetic shielding materials, established a complete "Electromagnetic Shielding Materials System Framework", and drafted the national standard "Testing Methods for the Shielding Effectiveness of Planar Electromagnetic Shielding Materials". Used to measure the shielding effectiveness of planar electromagnetic shielding materials. The established "Standard System Framework for Electromagnetic Shielding Materials" was searched through a new search by the Shanghai City Institute of Scientific Information, and it was concluded that "there are no similar standards and literature reports within the domestic search scope, so the project is novel." The technical keys to solving the following are:
a. Eliminate contact impedance issues between the measuring fixture and the sample;
b. Solve high-order mode problems that occur in test equipment;
c. Theoretical analysis, establish an equivalent circuit system, and compare it with the measurement results.
The technical indicators are as follows:
a. Frequency range 30MHz~3GHz
b. Voltage standing wave ratio<1.2
c.特性阻抗为
d.传输损耗<1dB
e.测量动态范围>100dB;
The sub-topic of "Research and Formulation of Technical Standards for the Detection of Hazardous Impurities in Gases for the Semiconductor Industry" studies detection methods for the particulate content in gases, trace moisture in gases, and oil content in gases that meet the testing needs of the semiconductor industry. On this basis, the "Determination of Particle Content in Gases-Light Scattering Method-Part 1: Determination of Particle Content in Pipeline Gases" and "Determination of Trace Moisture in Body Part 3: Three national standards, Optical Cavity Ring-Down Spectroscopy and Infrared Spectroscopy, have established a standard system for the detection of harmful impurities in gases used in the semiconductor industry.
To sum up, this project has developed a set of shielding effectiveness testing devices for electromagnetic shielding materials, established the "Electromagnetic Shielding Materials System Framework", drafted 4 national standards, and applied for 1 utility model patent. The system framework and national standards are both formulated for the first time in our country and have strong innovation and application value.
The establishment of a standard system framework for electromagnetic shielding materials is conducive to the improvement of electromagnetic shielding material technology in China (especially in Shanghai and the surrounding areas of the Yangtze River Delta), especially the improvement of electromagnetic shielding effectiveness testing technologies and methods, and will help R & D companies improve their production technology level., produce products that meet national standards (encourage stricter than national standards), further standardize the market for electromagnetic shielding materials products, better serve consumers, and promote the improvement of the overall level of relevant industry fields.
The promulgation of technical standards for the detection of harmful impurities in gases can change the current situation of the lack of accurate and unified methods for monitoring and evaluating gas quality in the semiconductor and electronic and electrical industries.