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Prismo A7 Metal Organic Compound Vapor Deposition (MOCVD) Equipment
Prismo A7TM MOCVD: Domestic products are leading in preparing compound semiconductor epitaxial wafers such as LEDs.
Type
Equipment
Tags
Resource conservation
Light emitting diode
Chemical engineering
Semiconductor equipment
Gallium nitride
Mocvd
Solution maturity
Mass promotion / Mass production
Cooperation methods
Joint venture cooperation
Face-to-face consultation
Applicable industry
Manufacturing
Applications
Semiconductor industry
Key innovations
The Prismo A7TM MOCVD equipment has been independently developed, breaking foreign monopolies and reaching the international advanced level.
Potential economic benefits
Achieve domestic substitution of high-end equipment, break international monopoly, and ensure the safety of the industrial chain. Improve production efficiency, reduce costs, and significantly increase market share and economic benefits.
Potential climate benefits
Its gas source utilization rate is high, significantly reducing material and energy waste. High-efficiency and high-yield production accelerates the popularization of energy-saving LEDs and effectively reduces global lighting carbon emissions.
Solution supplier
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China Micro Semiconductor Equipment (Shanghai)
China Micro Semiconductor Equipment (Shanghai)
China Micro Semiconductor Equipment is an advanced supplier of semiconductor microprocessing equipment, providing key technologies for integrated circuit, LED and display manufacturing.
China
Solution details

The Prismo A7TM metal-organic compound vapor deposition (MOCVD) equipment independently developed by this project is a key equipment for the research and production of compound semiconductor epitaxial materials (gallium nitride, etc.). It is suitable for large-scale industrial production of compound semiconductor functional structural materials. It is a key equipment for the preparation of gallium nitride-based light emitting diodes and laser epitaxial wafers, and can also be used for the growth of other optoelectronic and microwave device materials. It is an indispensable strategic high-end semiconductor equipment for today's national economic security and development.  At present, China has more than 60% of the world's new installed capacity of MOCVD equipment. However, before 2016, all large-scale MOCVD equipment relied on imports. More than 90% of the global MOCVD equipment market was monopolized by Veeco of the United States and Aixtron of Germany. In order to break this pattern, China Micro successfully developed Prismo D-Blue MOCVD equipment in 2013. On this basis, the development of the second-generation MOCVD equipment Prismo A7TM began in 2015, and the prototype installation and debugging were completed in mid-2016. After laboratory process and performance verification, all indicators met or exceeded the design requirements, reaching the international advanced level. It is suitable for large-scale production of blue-green LED epitaxial wafers, and has begun to gradually realize application promotion and domestic substitution.  Due to the market competitiveness brought by its excellent performance, production capacity and quality, China-Micro Prismo A7TM MOCVD equipment has quickly formed large-scale industrial sales. Domestic customers include almost all large-scale LED manufacturers, and well-known overseas production companies have also begun to buy. As of December 2018, China Micro Corporation has shipped 235 reaction chambers and produced nearly 26 million wafers (converted to 2 inches). In 2018, China Micro Corporation Prismo A7TM MOCVD has a domestic market share in MOCVD equipment for lighting. With more than 80%, and an international market share is close to 50%, it is already the best-selling MOCVD equipment in the world.  This equipment can be configured with 1 to 4 reaction chambers, each reaction chamber can be independently controlled, or multiple reaction chambers can be controlled in conjunction; production of 100 consecutive furnaces does not require opening the chamber for maintenance, which is a prominent highlight of medium and micro equipment. The equipment can achieve automated loading, unloading and continuous production, is simple to operate and maintain, and is designed in compliance with SEMI S2 standard. It has high reliability, high repeatability and high production yield, and has the largest single furnace production capacity compared with similar foreign equipment. The main innovations: 1) The free switching of independent control and linkage control of each reactor makes the equipment more flexible in application in production;2) The outer area airflow curtain design greatly improves the utilization of gas and MO sources;3) The key-type tray design can realize real-time detection and historical traceability of each epitaxial wafer during the growth process;4) Design a special embedded fully automatic programmable reaction chamber opening and closing system to make the operation of opening the chamber and replacing parts easier, and return to normal working conditions faster.  A total of 69 domestic and foreign patents have been applied for this project, including 43 invention patents; 56 have been authorized, including 31 invention patents. In 2017, Veeco initiated a patent lawsuit against a micro tray supplier in the United States. While assisting suppliers in responding to the lawsuit, China Micro sued Veeco in China for infringement of the design patents of China Micro trays, and filed patent invalidity requests against Veeco's multiple global patents of the same family. This intellectual property struggle ended in reconciliation between all parties.  The results of this project mark that MOCVD equipment with independent intellectual property rights has truly been localized, and China's LED industry has become an international leader in the field of core equipment MOCVD.

Last updated
03:13:50, Nov 05, 2025
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