2.1 Project approval background, importance and significance
At present, the measurement method of planarity of flat crystals in my country mainly uses a planar equal-thickness interferometer to measure it. The piece under test is placed on the surface of a standard flat crystal and separated by a thin sheet to form equal-thickness interference fringes. The bending amount of the interference fringes and the interference fringes are manually read to calculate the flatness of the working surface of the flat crystal. This method is inefficient in measurement, easy to scratch the test object, and is limited to qualitative testing, so it cannot achieve rapid, non-destructive, and quantitative testing in flat crystal testing. The main content of this project is to develop a set of flat crystal calibrator, which can not only measure the flatness of flat crystal by using point-instead-plane measurement method, but also measure the flatness of the entire plane of flat crystal, and at the same time display the three-dimensional surface to adapt to the development trend of modern flatness measurement.
2.2 Main scientific and technological content
The main innovation points of this project are as follows: 1) Engineering realization of modular design: The project innovatively proposes the modular design concept of core components of the instrument. Different combination models can more flexibly meet different testing needs and price requirements, and greatly reduce cost (Invention patents: ZL201210249906.8, ZL2006100927107, utility model patents:ZL201220350584.1, ZL201200233502.5, for papers and works, see Attachment-6, other certification materials (2)-(5));2) Fizeau interferometer and phase shift technology: For the first time, the flat crystal flatness calibrator innovatively adopts the Fizeau interferometer structure and phase-shift measurement method. The system is highly resistant to interference, and can obtain high measurement accuracy, eliminating system and environmental errors caused by traditional testing (Invention patent: ZL2012101960837, utility model patents: ZL201220280186.7, ZL2013207357082, see Attachment-6, Other supporting materials (1) and (7));3) Real-time interferometric imaging technology: This project analyzes interference images through real-time data acquisition, displays 2D and 3D graphics and longitudinal/cross-section curves, and uses R parameters to describe the surface topography, which is more than doubled compared with current similar instruments, leading my country's current Advanced level of flat crystal verification instrument (Invention patent: ZL201210161691.4, utility model patent: ZL201320103528.2, ZL2013207356624, see Attachment-6, Other supporting materials (6)).
2.3 Technical and economic indicators, economic and social benefits
A total of 1.25 million yuan has been invested in this project. As of project acceptance, the company's new output value was 3.4 million yuan, the company's sales revenue was 2.6092 million yuan, and new tax revenue was 244,500 yuan.
Its social benefits include: (1) Targeted solutions to the problems of excessive testing environment requirements, low efficiency, low precision, and high costs of existing instruments. (2) Suzhou Huili Instrument Co., Ltd. participated in the drafting of new national Pingjing verification regulations, which will promote the improvement of the transmission level of geometric quantity measurement and value in my country. (3) The completion of this project can improve my country's high-end R & D and manufacturing level of optical machinery, break the foreign technology blockade, and improve the quality of "Created in China" products.
The science and technology novelty search report shows that this project's non-destructive calibrator with modularity combination and low cost is a new direction for on-site testing needs in industrial processing. It is recommended that core technologies apply for invention or utility model patents to form independent intellectual property rights. See Attachment-6 and Other Supporting Materials (8)-(16) for the scientific and technological novelty search report.
2.4 Industry promotion and industry value
This project focuses on proposing the design concept of modular combination. The laser interferometer developed using this idea has the characteristics of high precision, miniaturization, combination, low cost, and strong anti-interference capabilities. It is widely used in various fields such as optical processing components. The research and development and implementation of the entire project have completed the predetermined design indicators, realized the engineering of the project instrument, and provided a solid foundation and conditions for the industrialization of the instrument.