This project studies the state perception methods of physical indicators such as temperature and humidity, crack (joint) development, deformation, and leakage based on the specific service environment of urban subway tunnels. The implementation method of micro-electro-mechanical systems (MEMS) smart terminals is studied, and through theoretical research, model tests, and wireless sensor development, a wireless intelligent sensing system suitable for structural safety of subway tunnels has been developed. Through the intelligent sensing terminal composed of wireless inclination sensors, wireless water leakage sensors and wireless crack (joint) sensors, wireless sensing of subway tunnel structural deformation, water leakage and cracks (joint) joints is realized, and the safety status of the tunnel structure is evaluated through the subway traffic environment.