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High-resolution electron backscatter diffraction
EBSD: Nano-scale crystal structure analysis helps material development and quality control.
Type
Equipment
Tags
Other
High precision
Wide range
Instrumentation technology
Electron backscatter diffractometer
High resolution
Solution maturity
Early adoption / Process verification
Cooperation methods
Other
Applicable industry
Scientific research and technology services
Applications
Material analysis
Key innovations
The innovation of this EBSD is that it uses a detector combined with a new rare earth-doped fluorescent material and a highly sensitive CMOS camera to improve the signal-to-noise ratio of the diffraction pattern from the source.
Potential economic benefits
Improve research and development efficiency, optimize material properties, reduce production losses, and drive industrial upgrading. Strong batch production capacity and broad market application prospects are expected to replace imports and create significant economic value.
Potential climate benefits
EBSD helps material optimization, new materials and efficient process development, which can indirectly promote product lightweight, energy saving and efficiency improvement, and reduce carbon emissions throughout the life cycle.
Solution supplier
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Shanghai Institute of Silicate, Chinese Academy of Sciences
Shanghai Institute of Silicate, Chinese Academy of Sciences
The Shanghai Institute of Silicate, Chinese Academy of Sciences, focuses on the research of advanced inorganic materials and supports high-tech industries and major national needs.
Shanghai，China
Solution details

1. application field

Electron Backscatter Diffraction (EBSD) is a new microscopic analysis equipment that can realize micro-area crystallographic microstructure analysis in a large range (micron scale) and with high precision (nanometer scale). It can be applied to almost all polycrystalline and single crystal materials to obtain statistical information on grain size distribution, phase composition, orientation and texture.

2. technical characteristics

A high-efficiency phosphor screen detector design scheme combining a new rare earth-doped fluorescent material with a highly sensitive CMOS camera improves the signal-to-noise ratio of the collected diffraction pattern from the source; diffraction pattern image wavelet noise reduction, image rotation, gray gradient extraction and The combination of Hough transform improves the calibration accuracy of Kikuchi band recognition, thereby significantly improving its spatial resolution and angular resolution.

3. performance Index

High-resolution electron backscatter diffractometer EBSD: spatial resolution ≤70nm, angular resolution ≤0.07°, measurable minimum strain ≤ 0.1%, phase identification, orientation distribution statistical analysis functions.

4. current state

At present, the project team has completed a prototype of a high-resolution electron backscatter diffractometer; it has the ability to produce mass.

Last updated
11:07:21, Nov 05, 2025
Information contributed by
Green Technology Bank

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